International Conference on Solid State Devices and Materials
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2020 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2020
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2020 International Conference on Solid State Devices and Materials
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2020 International Conference on Solid State Devices and Materials
Sep 27
- Sep 30, 2020
[B-10-02]
HfN Multi Charge Trapping Layers for Hf-based MONOS Nonvolatile Memory
〇Shun-ichiro Ohmi
1
, Yusuke Horiuchi
1
, Hiroki Morita
1
, Akio Ihara
1
, Jooyoung Pyo
1
(1. Tokyo Tech(Japan))
https://doi.org/10.7567/SSDM.2020.B-10-02
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