2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020
International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

[B-10-02]HfN Multi Charge Trapping Layers for Hf-based MONOS Nonvolatile Memory

〇Shun-ichiro Ohmi1, Yusuke Horiuchi1, Hiroki Morita1, Akio Ihara1, Jooyoung Pyo1(1. Tokyo Tech(Japan))
https://doi.org/10.7567/SSDM.2020.B-10-02