2020 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2020
2020 International Conference on Solid State Devices and Materials
Sep 27 - Sep 30, 2020
[B-10-03]80nm Tall Thermally Stable Cost Effective FinFETs for Advanced DRAM Periphery Devices for AI/ML and Automotive Applications
〇Alessio Spessot1, Romain Ritzenthaler1, Eugenio Dentoni Litta1, Emmanuel Dupuy1, Barry O’Sullivan1, Joao Bastos1, Elena Capogreco1, Kenichi Miyaguchi1, Vladimir Machkaoutsan2, Younggwang Yoon3, Pierre Fazan2, Horiguchi Naoto1(1. imec(Belgium), 2. Micron (Belgium), 3. SK Hynix(Belgium))
