2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020
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International Conference on Solid State Devices and Materials
2020 International Conference on Solid State Devices and Materials

2020 International Conference on Solid State Devices and Materials

Sep 27 - Sep 30, 2020

[B-2-04]Antiferroelectricity and Cycling Behavior of ALD ZrO2 Ultra-thin Films

〇Xuan Luo1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1(1. Univ. of Tokyo(Japan))
https://doi.org/10.7567/SSDM.2020.B-2-04
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