[M1C-05]Large Area Precision Optical Coatings by Pulse Magnetron Sputtering
○D. Gloess 1, H. Bartzsch 1, T. Goschurny 1, A. Drescher 1, U. Hartung 1, P. Frach 1(1.Fraunhofer Inst. for Organic Electronics, Electron Beam and Plasma Technology FEP (Germany))
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