The 39th International Conference of Photopolymer Science and Technology

The 39th International Conference of Photopolymer Science and Technology

2022年6月28日〜6月30日オンラインミーティング
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The 39th International Conference of Photopolymer Science and Technology
The 39th International Conference of Photopolymer Science and Technology

The 39th International Conference of Photopolymer Science and Technology

2022年6月28日〜6月30日オンラインミーティング

[2A101]Dependence of Dissolution Kinetics of Main-Chain Scission Type Resists on Molecular Weight

*Akihiro Konda1, Hiroki Yamamoto2, Takahiro Kozawa1, Shusuke Yoshitake3(1. Osaka University, 2. National Institutes for Quantum Science and Technology, 3. NuFlare Technology Inc.)
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