[14p-2Q-8]自己形成法を用いた、ナノメートル領域のボトムアップ法とマイクロメートル領域のトップダウン法との架橋技術の構築
〇章 国強1,2、滝口 雅人1,2、舘野 功太1,2、後藤 秀樹1(1.NTT 物性研、2.NTT NPC)
キーワード:
半導体、ナノワイヤ、自己組織化
This work presents a method that bridges the gap between the nanometer-scale bottom-up and micrometer-scale top-down approaches for site-defined InP/InAs heterostructure NWs, which has long been a significant challenge for applications that require low-cost and high-throughput manufacturing processes.
