2018年第65回応用物理学会春季学術講演会
2018年3月17日〜3月20日早稲田大学西早稲田キャンパス／ベルサール高田馬場
2018年第65回応用物理学会春季学術講演会
2018年3月17日〜3月20日早稲田大学西早稲田キャンパス／ベルサール高田馬場
[18p-F202-16]Al/ZnO nanorods-based microcantilever sensor for high sensitivity CO detection
〇(D)Lia Aprilia1,2、Ratno Nuryadi3、Makoto Hosoda1、Yoichiro Neo1、Arief Udhiarto2、Djoko Hartanto2、Hidenori Mimura1(1.Shizuoka Univ.、2.UI、3.BPPT)
Microcantilever is prospective to be applied as a gas sensor at room temperature. In this work, zinc oxide nanorods (ZnO NRs) was coated on the microcantilever as a sensitive layer for CO detection. To increase sensing response, aluminium (Al) atom was doped on ZnO NRs-coated microcantilever (AZNMC) by a sputtering technique. Figure 1(a) shows electron probe microanalyzer (EPMA) micrograph of AZNMC. High concentration of Al arised where the ZnO NRs exist, which indicated that Al was selectively combined with the crystal structure of NRs. The sensing property was investigated by measuring resonance frequency profile of the vibrating microcantilever in varied gas concentration. In addition, the highest sensitivity was obtained for CO gas compared to the other gases, i.e., CO2 and CH4, as shown in Fig. 1(b). The CO gas sensing response in femto-gram order was observed. The presence of Al atoms in ZnO NRs generates strong interaction between CO and Al-doped ZnO NRs enhancing the sensitivity to CO. This result opens the possibility of AZNMC to be applied as highly sensitive CO sensor.