1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

1974年9月2日〜9月3日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

1974年9月2日〜9月3日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B2-2]A Novel Planar Multilevel Interconnection Technology Utilizing Polyimide

SEIKI HARADA、KIKUJI SATO、ATSUSHI SAIKI、TAKESHI KIMURA TOSHIO OKUBO、KIICHIRO MUKAI(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1974.B2-2
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