1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

1977年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

1977年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-2]Effects of High Dose Rate Phosphorus Implantation into Silicon

M. Tamura、K. Yagi、N. Sakudo、K. Tokiguchi、T. Tokuyama(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1977.A-4-2
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