1977 Conference on Solid State Devices
1977年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
1977 Conference on Solid State Devices
1977年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[B-3-1]Analysis of Two-Dimensional Etching Effect on the Profiles of Fine Holographic Grating Made of Positive Photoresist AZ2400
K. Kodate、T. Kamiya、H. Takenaka、H. Yanai(1.Physics Laboratory, Japan Women's University、2.Department of Electronic Engineering, University of Tokyo)
