1977年8月30日〜8月31日The Tokyo Chamber of Commerce and Industry, Tokyo, Japan
[B-6-2]In Depth Profiles of Oxide Films on GaAs Studied by XPS
Y. Mizokawa、H. Iwasaki、R. Nishitani、S. Nakamura(1.Junior College of Engin ering, University of Osaka Prefecture、2.The Institute of Scientific and Industrial Research, Osaka University)