1982 International Conference on Solid State Devices

1982 International Conference on Solid State Devices

1982年8月24日〜8月26日Sunshine City Prince Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1982 International Conference on Solid State Devices

1982 International Conference on Solid State Devices

1982年8月24日〜8月26日Sunshine City Prince Hotel, Tokyo, Japan

[B-3-3]A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET)

Ken YAMAGUCHI、Yasuhiro SHIRAKI、Yoshifumi KATAYAMA、Yoshimasa MURAYAMA(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1982.B-3-3
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