1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

1984年8月30日〜9月1日International Conference Center Kobe, Kobe, Japan
International Conference on Solid State Devices and Materials
1984 International Conference on Solid State Devices and Materials

1984 International Conference on Solid State Devices and Materials

1984年8月30日〜9月1日International Conference Center Kobe, Kobe, Japan

[A-2-5]Characteristics of Selective Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo、Nobuyuki Takakura、Daisuke Takehara、Susumu Namba(1.Department of Electrical Engineering Faculty of Engineering Science, Osaka University)
https://doi.org/10.7567/SSDM.1984.A-2-5