1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[A-1-3]Characterization and Performance Analysis of Masked LDD Transistor for CMOS VLSIs

Masaki Sato、Kuniyoshi Yoshikawa、Shigeru Atsumi、Seiichi Mori、Koji Makita、Akemi Omichi、Hiroshi Nozawa(1.Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)
https://doi.org/10.7567/SSDM.1985.A-1-3