[A-1-3]Characterization and Performance Analysis of Masked LDD Transistor for CMOS VLSIs
Masaki Sato、Kuniyoshi Yoshikawa、Shigeru Atsumi、Seiichi Mori、Koji Makita、Akemi Omichi、Hiroshi Nozawa(1.Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)
