1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
戻る
International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[A-1-4]A New Self-Aligned Contact Technology for LDD MOS Transistors

A. Shinohara、M. Fukumoto、G. Fuse、S. Odanaka、M. Sasago、T. Ohzone、T. Ishihara(1.Semiconductor Research Center Matsushita Electric Ind. Co., Ltd.)
https://doi.org/10.7567/SSDM.1985.A-1-4
PDFダウンロードPDFダウンロード
戻る