1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[A-1-6]Three Dimensional Leakage Current in Corrugated Capacitor Cells

Eiji TAKEDA、Kan TAKEUCHI、Atsushi HIRAIWA、Toru TOYABE、Hideo SUNAMI、Kiyoo ITOH(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1985.A-1-6