1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[A-2-3]Crystal Orientations for Unseeded SOI Films Recrystallized by a mm Long CW Line-Source Electron Beam

H. HADA、S. SAITOH、H. OKABAYASHI(1.Microelectronics Research Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.1985.A-2-3
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