1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[A-3-8]Laser Initiated Chemical Vapor Deposition of Tungsten Films on Silicon Dioxide

A. Shintani、S. Tsuzuku、E. Nishitani、M. Nakatani(1.Central Res. Lab. Hitachi, Ltd.、2.Production Engineering Res. Lab. Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1985.A-3-8
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