1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
International Conference on Solid State Devices and Materials
1985 Conference on Solid State Devices and Materials

1985 Conference on Solid State Devices and Materials

1985年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[C-1-1]A New Thermal CVD Method to Prepare High Quality Amorphous Silicon

Hideki Matsumura、Hiroyuki Tachibana、Hisanori Ihara(1.Department of Physical Electronics, Hiroshima University)
https://doi.org/10.7567/SSDM.1985.C-1-1