1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan

[A-3-4]Low Pressure Silicon Epitaxy Using Si2H6

Fumitake MIENO、Yuji FURUMURA、Mamoru MAEDA(1.Process Engineering Dept. Semiconductors Group Fujitsu Ltd.)
https://doi.org/10.7567/SSDM.1986.A-3-4
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