1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan
International Conference on Solid State Devices and Materials
1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan

[A-4-1]Laser Induced Gas-Surface Chemistry and Photoetching of Solids

T. J. Chuang(1.IBM Almaden Research Center)
https://doi.org/10.7567/SSDM.1986.A-4-1