1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan

[B-1-2]Advanced OSELO Isolation with Shallow Grooves for Three-quarter Micron ULSIs

Toru KAGA、Yoshifumi KAWAMOTO、Shin-pei IIJIMA、Yoshimi SUDOH、Yoshio SAKAI(1.CENTRAL RESEARCH LABORATORY, HITACHI Ltd.)
https://doi.org/10.7567/SSDM.1986.B-1-2
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