1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan
International Conference on Solid State Devices and Materials
1986 International Conference on Solid State Devices and Materials

1986 International Conference on Solid State Devices and Materials

1986年8月20日〜8月22日Tokyo Prince Hotel, Tokyo, Japan

[C-3-4]Selective Double Diffusion of Zn and Si into GaAs Using Sputtered Si Masks

E. Omura、G. A. Vawter、X. S. Wu、L. A. Coldren、J. L. Merz(1.Department of Electrical and Computer Engineering University of California)
https://doi.org/10.7567/SSDM.1986.C-3-4