1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

1987年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

1987年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[A-1-1]SCC (Surrounded Capacitor Cell) Structure for DRAM

G. Fuse、K. Tateiwa、S. Odanaka、T. Yamada、I. Nakao、H. Shimoda、O. Shippou、M. Fukumoto、J. Yasui、Y. Naito、T. Ohzone(1.Matsushita Elec. Ind. Co. Ltd. Semiconductor Research Center)
https://doi.org/10.7567/SSDM.1987.A-1-1
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