[B-7-2]Electron-Beam Exposure Epitaxy (EBE-Epitaxy) for the Formation of SOI-GaAs Films on CaF2/Si(111) Structures
Hee Chul LEE、Tanemasa ASANO、Hiroshi ISHIWARA、Seigo KANEMARU、Seijiro FURUKAWA(1.Graduate School of Science and Engineering, Tokyo Institute of Technology)
