1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

1987年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
戻る
International Conference on Solid State Devices and Materials
1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

1987年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[C-1-3]Seed Shape Dependence of Si Solid Phase Epitaxy

Eiichi Murakami、Masahiro Moniwa、Kikuo Kusukawa、Masanobu Miyao、Terunori Warabisako、Yasuo Wada(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1987.C-1-3
PDFダウンロードPDFダウンロード
戻る