1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

1987年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1987 Conference on Solid State Devices and Materials

1987 Conference on Solid State Devices and Materials

1987年8月25日〜8月27日Nippon Toshi Center, Tokyo, Japan

[C-1-4]SOI Recrystallization using a Multiply Separated Seed Structure

S. Kambayashi、T. Inoue、M. Kemmochi、I. Higashinakagawa、T. Yoshii(1.VLSI Research Center, Toshiba Corporation)
https://doi.org/10.7567/SSDM.1987.C-1-4
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