1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-1-1]Experimental Technology and Performance of 0.1μm Gate-Length Low Temperature Operation MOSFETs

G. A. Sai-Halasz(1.IBM Research Division, T. J. Watson Research Center)
https://doi.org/10.7567/SSDM.1988.A-1-1
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