1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-1-4]A New Device Structure Utilizing Atomic Layer Doping (ALD) Technology in Si Systems

Ken YAMAGUCHI、Kiyokazu NAKAGAWA、Yasuhiro SHIRAKI(1.Central Research Laboratory, Hitachi Ltd.、2.Research Center for Advanced Science and Technology University of Tokyo)
https://doi.org/10.7567/SSDM.1988.A-1-4
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