1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-3-2]Very-Low-Temperature Epitaxial Silicon Growth by Low-Kinetic-Energy Particle Bombardment

Tadahiro Ohmi、Kiyohiko Matsudo、Tadashi Shibata Takeshi Ichikawa、Hiroshi Iwabuchi(1.Department of Electronics, Faculty of Engineering Tohoku University)
https://doi.org/10.7567/SSDM.1988.A-3-2
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