1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-4-1]Selective Growth of Polycrystalline Silicon by Laser-Induced Cryogenic CVD

Takeshi TANAKA、Koji DEGUCHI、Seiichi MIYAZAKI、Masataka HIROSE(1.Department of Electronics, Hiroshima Institute of Technology、2.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1988.A-4-1
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