1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-5-3]Tungsten Plug Technology: Substituting Tungsten for Silicon Using Tungsten Hexaflouride

Nobuyoshi Kobayashi、Masayuki Suzuki、Masayoshi Saitou(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1988.A-5-3
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