1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-5-4]Evaluation of Laser CVD Tungsten for Gate Electrode

Hideaki Matsuhashi、Satosi Nishikawa、Seigo Ohno(1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1988.A-5-4
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