1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-5-5]TiSi2 and TiN Formation by Ti-Ion Implantation and Their Application to MOS Devices

Yasuhisa Omura、Hiroshi Inokawa、Katsutoshi Izumi(1.NTT LSI Laboratories)
https://doi.org/10.7567/SSDM.1988.A-5-5
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