1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-7-1]High-Dose and MeV-Energy Ion Implantation into Si for Buried-Layer Formation

Tadashi SUZUKI、Masao TAMURA、Kiyonori OHYU、Nobuyoshi NATSUAKI(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1988.A-7-1
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