1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-7-3]Lateral Diffusion of Dopants beyond Preamorphized Region

T. IZAWA、M. KASE、H. MORI、K. KOBAYASHI、M. NAKANO(1.Advanced Tech. Division and Process Development Division, FUJITSU LTD.)
https://doi.org/10.7567/SSDM.1988.A-7-3
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