1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-8-2]Photo-Enhanced Boron-Doping in Low-Temperature Silicon Epitaxy and Its FTIR Study

S. Watanabe、T. Yamazaki、Y. Nara、T. Ito(1.FUJITSU LABORATORIES LTD., ATSUGI)
https://doi.org/10.7567/SSDM.1988.A-8-2
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