1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[A-8-3]A New Dopant Diffusion Modeling Based on Point Defect Kinetics

Takako KASHIO、Koichi KATO(1.ULSI Research Center, Toshiba Corporation)
https://doi.org/10.7567/SSDM.1988.A-8-3
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