1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[C-1-3]Crystal Defect Study of Solid Phase Epitaxially Grown Si Surrounded by SiO2 Structures

Eiichi Murakami、Masao Tamura、Kikuo Kusukawa、Masahiro Moniwa、Terunori Warabisako、Masanobu Miyao(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1988.C-1-3
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