1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[C-1-4]Recrystallization Mechanism for Solid Phase Growth of Poly-Si Films on Quartz Substrates

Akira NAKAMURA、Fumiaki EMOTO、Eiji FUJII、Yasuhiro UEMOTO Atsuya YAMAMOTO、Kohji SENDA、Gota KANO(1.Electronics Research Laboratory Matsushita Electronics Corporation)
https://doi.org/10.7567/SSDM.1988.C-1-4
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