1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1988 International Conference on Solid State Devices and Materials

1988 International Conference on Solid State Devices and Materials

1988年8月24日〜8月26日Keio Plaza Hotel, Tokyo, Japan

[C-1-5]Performance and Microstructural Analysis of 3D Circuits Fabricated in E-Beam Recrystallized SOI

Haroon AHMED、Richard A. McMAHON(1.Microelectronics Research Laboratory, Department of Physics, Cambridge University)
https://doi.org/10.7567/SSDM.1988.C-1-5
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