1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

1989年8月28日〜8月30日Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

1989年8月28日〜8月30日Nippon Toshi Center, Tokyo, Japan

[A-8-3]Capacitance-Enhanced Stacked-Capacitor with Engraved Storage Electrode for Deep Submicron DRAMs

T. Mine、S. Iijima、J. Yugami、K. Ohga、T. Morimoto(1.Central Research Laboratory, Hitachi Ltd.、2.Hitachi VLSI Engineering Corp.)
https://doi.org/10.7567/SSDM.1989.A-8-3
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