1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

1989年8月28日〜8月30日Nippon Toshi Center, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1989 Conference on Solid State Devices and Materials

1989 Conference on Solid State Devices and Materials

1989年8月28日〜8月30日Nippon Toshi Center, Tokyo, Japan

[B-3-2]Integrated Mass Flow Controller by Micromachining of Silicon

Masayosi ESASHI、Akira NAKANO、Shuichi SHOJI(1.Department of Electronic Engineering Tohoku University)
https://doi.org/10.7567/SSDM.1989.B-3-2
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