1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-3-1]In-Situ Observation of Electromigration in Cu Film with Scanning μ-RHEED Microscope

Kazuya Masu、Yohei Hiura、Kazuo Tsubouchi、Tadahiro Ohmi、Nobuo Mikoshiba(1.Research Institute of Electrical Communication, Tohoku University、2.Department of Electronics, Faculty of Engineering, Tohoku University)
https://doi.org/10.7567/SSDM.1991.A-3-1
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