1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-3-2]Sputtering of Aluminum Film Using Microwave Plasma with High Magnetic Field

S. Takehiro、N. Yamanaka、A. Narai、H. Shindo、S. Shingubara、Y. Horiike(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1991.A-3-2
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