1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-3-3]Deposition of Polycrystalline Silicon by Rapid Thermal CVD and Its Application to Direct Contact to TiSi2

T. Yamaguchi、H. Itoh、T. Katayama、K. Tsukamoto、Y. Akasaka(1.LSI Laboratory, Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.1991.A-3-3
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