1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-4-2]Selective Epitaxial Growth of Silicon and Germanium at Low Temperatures Using Ultraclean CVD Processing

Junichi MUROTA、Manabu KATO、Nobuo MIKOSHIBA、Shoichi ONO(1.Research Institute of Electrical Communication, Tohoku University)
https://doi.org/10.7567/SSDM.1991.A-4-2
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