1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[B-1-2]Ion Flux Effect in Low Temperature Silicon Epitaxy by Low-Energy Ion Bombardment

Tohru YOSHIE、Masaki HIRAYAMA、Tadahiro OHMI(1.Department of Electronics, Tohoku University)
https://doi.org/10.7567/SSDM.1991.B-1-2
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