1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[B-1-3]Amorphization Processes in Ion Implanted Si: Temperature Dependence

T. Motooka、F. Kobayashi、P. Fons、T. Tokuyama T. Suzuki、N. Natsuaki(1.University of Tsukuba、2.Device Development Center, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1991.B-1-3
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