1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[B-2-2]Proximity Gettering of Micro-Defects by High Energy Ion Implantation

T. Kuroi、S. Komori、K. Fukumoto、Y. Mashiko、K. Tsukamoto、Y. Akasaka(1.LSI Laboratory, Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.1991.B-2-2
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